2025년 12월 31일
Agent-based RCA in Manufacturing (KR)
10-2025-0216860 · KP25154
발명자
Taekwon Jee, Jihoon Jung, Jeng-Hun Suh
출원인
SemiAI, Co.,Ltd.
정식 명칭
METHOD FOR PERFORMING ROOT CAUSE ANALYSIS IN MANUFACTURING PROCESS BY USING AGENT BASED MULTI MODAL REASONING MODEL AND ROOT CAUSE ANALYSIS DEVICE USING THE SAME
요약
This invention provides an optimized overlay sampling method that maintains high accuracy with fewer measurement points. It uses rule-based sampling as an initial seed, combines it with random sampling, and applies a genetic algorithm to find optimal sampling locations. The algorithm iteratively evaluates fitness and performs selection, crossover, and mutation, while allowing hierarchical sampling based on layer importance. This approach reduces measurement cost while preserving accuracy and improving convergence and practicality in semiconductor manufacturing.