EPE Budget
A yield-linked EPE budget prioritization engine Composes candidate EPE formulations from pattern-edge measurements, learns their linkage to yield, and outputs a Pareto-ranked priority list across budget components.
What it does
- 01
Gauge selection and component-entry extraction
Vision AI scores critical-site vulnerability on layer-pair patterns, picks coverage-constrained Top-K gauges, and extracts measurable component entries — overlay, CDU, LER, 3D-aware proxies.
- 02
3D-aware proxies inferred from 2D metrology
Estimates top-CD, bottom-CD and sidewall asymmetry from 2D SEM / HV-SEM images alone, feeding profile-risk indicators into the candidate EPE formulations as the 3D term.
- 03
Multi-target linkage and a budget Pareto
Matches candidate EPE formulations against single-layer, layer-pair, die/wafer and device-level metrics to set the selected EPE set and weights k, then apportions yield impact across budget components and multiplies by process controllability to surface the fixable items first.
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