Semi-Vision
An SEM measurement alignment engine Defect inspection, noise removal and SNR amplification are handled by a single AI engine. Measurements align onto the same reference even when SEM make and model differ.
What it does
- 01
Cross-Tool Measurement Alignment
Learns each tool's signature and auto-corrects inter-tool measurement bias. Delivers recipe portability across heterogeneous tools and fabs, aligning measurements onto a single reference.
- 02
AI Defect Inspection & Classification
Detects and classifies defects on SEM images, packaging coordinates into the report. Cuts repetitive manual review and false positives so engineers spend their time on actionable findings.
- 03
Throughput Optimization
Reconstructs equivalent or better image quality with fewer averaged frames, cutting acquisition time. Lifts inspection throughput without giving up measurement reliability.
Available in
SMILE Pro
Aligns measurements from heterogeneous SEM tools onto a single reference so downstream chart interpretation and natural-language follow-ups operate in a shared coordinate system.
SMILE Pro+
Absorbs metrology-stage drift before production so PRISM forecasts and INFER diagnostics behave consistently across multi-tool measurements.
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