PRISM

A real-time prediction engine for process drift Predicts process hotspots in real time and proposes corrections for the next lot — catching drift before APC reacts.

What it does

01
Real-time overlay and hotspot prediction
Stream production-line measurements and predict overlay drift and hotspots as they form.
02
Feed-forward control
PRISM stitches signals across Scanner → metrology → Etch and pushes corrections forward into the next lot.
03
Low-latency inference in production
Sub-second inference plugs straight into the real-time decision loop.

Impact

0.2 nm: Overlay accuracy
95%: Predictive accuracy
1,000×: Resolution speed

Available in

SMILE Pro

PRISM's predictive model powers layout and sampling optimization — informing what to measure and where.

SMILE Pro+

Acts as the core engine for predicting defects and process drift on the production line — catching variation before APC reacts and feeding corrections forward into the next lot.

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