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SemiAI

PRISM

A real-time prediction engine for process drift Predicts process hotspots in real time and proposes corrections for the next lot — catching drift before APC reacts.

What it does

  • 01

    Real-time overlay and hotspot prediction

    Stream production-line measurements and predict overlay drift and hotspots as they form.

    Real-time overlay and hotspot prediction
  • 02

    Feed-forward control

    PRISM stitches signals across Scanner → metrology → Etch and pushes corrections forward into the next lot.

    Feed-forward control
  • 03

    Low-latency inference in production

    Sub-second inference plugs straight into the real-time decision loop.

    Low-latency inference in production

Impact

0.2 nm
Overlay accuracy
95%
Predictive accuracy
1,000×
Resolution speed

Available in

SMILE Pro

PRISM's predictive model powers layout and sampling optimization — informing what to measure and where.

SMILE Pro+

Acts as the core engine for predicting defects and process drift on the production line — catching variation before APC reacts and feeding corrections forward into the next lot.

Tell us the challenge — we'll scope it with you.

You don't need detailed data ready. We reply within two business days with a tailored deployment scenario.

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